Distribution of Lamb Waves in AlScN Resonator Structures
Distribution of Lamb Waves in AlScN Resonator Structures
Author(s): Boris Nedyalkov, Evgenia ValchevaSubject(s): Social Sciences, Education, Essay|Book Review |Scientific Life, School education, Vocational Education, Higher Education , History of Education, Scientific Life
Published by: Национално издателство за образование и наука „Аз-буки“
Keywords: AlScN; Lamb wave; Lamb Wave Resonator (LWR); 6H-SiC, resonant frquency
Summary/Abstract: In this paper we present the results of a simulated model of resonator device comprised of AlScN/6H-SiC piezo-layers for use in RF electronic circuits. The device uses the piezoelectric effect and Al electrode gratings to generate Lamb waves with great frequencies. The small mechanical impedance, micrometric size and good electromechanical characteristics make it especially suited for the manufacturing of RF band-pass filters. Moreover, because of the mechanics of the Lamb Wave Resonator (LWR) device, it can allow for multiple resonant frequencies to be used with the same configuration. Here we show the basic characteristics of one such system using Al0,91Sc0,09N piezo-active layer and base layer from hexagonal SiC.
Journal: Химия. Природните науки в образованието
- Issue Year: 27/2018
- Issue No: 5
- Page Range: 700-707
- Page Count: 8
- Language: English
- Content File-PDF